We Help Reduce Your Cost-of-Ownership.
Central to enabling chamber-level cost reductions is the recycled chamber part. The micro-contamination control of a recycled part is now similar to the requirements for a new part. New part cleaning primarily eliminates surface manufacturing by-products. However, achieving similar results on a recycled part requires damage-free removal of deposited films. Fab maintenance programs utilizing recycled chamber parts cannot tolerate variability in particle performance or atomic level contamination because it affects start-up and process performance.
Uhp Parts Cleaning With Analytical Validation Improves Chamber Recovery, Reduces Tool Downtime & Increases Mtbc.
As a worldwide leader in ultra-high purity (UHP) semiconductor chamber tool parts cleaning and coatings, we meet the stringent cleaning and micro-contamination specifications of new and recycled parts. We provide solutions that improve process performance and lower overall cost-of-ownership.
We focus on the most critical process areas of wafer fabrication—ALD, CVD, etch, diffusion and PVD.
For ALD, we offer proprietary chemistry that selectively removes deposition, specialized facilities capabilities for large and heavy parts and the employment of ICP-MS and IC analysis techniques. In addition, we have extensive showerhead cleaning expertise and automated optical hole inspection for CVD.
Our expertise in etch tool kit cleaning offers:
- Minimally abrasive & non-contact processes
- Plasma re-coating surfaces & coatings superior to OEM films
- Quartz clean recipes that make the quartz less susceptible to process etch
We have more quartz, silicon carbide and silicon diffusion parts handling processes, equipment and protocols than all of our competitors combined. Our Environmentally Clean Process eliminates the use of chemicals for Twin Wire Arc Spray (TWAS)/deposit removal. In addition, we offer C-Coat, a proprietary coating that obtains superior performance over traditional TWAS coating on PVD parts.
The benefits of using our analytically validated ultra-clean part cleaning and coating processes are:
- Faster chamber recovery
- Longer mean time between cleans
- Extended part life
- More predictable chamber start-up & operation
- Faster part turnaround times resulting in reduced inventory costs
Most of our competitors only offer recycled chamber parts cleaning. What sets us apart is our vast experience in not only processing contaminated parts from wafer fabs ("recycle" parts), but in UHP cleaning of new parts for OEMs and OPMs.